Nanofabrication and characterization of high-line-density x-ray transmission gratings
نویسندگان
چکیده
منابع مشابه
High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates
Hard x-ray nanoimaging enables structural investigations of newmaterials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen. Two methods of zone plate nanofabrication are presented in this thesis. Zone plates are circular diffraction gratings with radially decreasing grating period. Their optical resolution depends on the width of the smallest zo...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2017
ISSN: 1932-5150
DOI: 10.1117/1.jmm.16.3.034503